Providing a full line of standard and customized technical services for the semiconductor industry.

Analytical Technical Services Group

• Commissions newly installed UHP backpad and in-fab
  gas distribution systems.
• Performs APIMS analysis at the backpad and in the
  fabrication facility.
• Analyses for particle impurities in all bulk gases.

Customer Applications Group

• Works closely with IC and OEM manufacturers on
  process effluent characterisation.
• Actively involved with process optimisation of PFC
  chamber cleans, focusing on NF₃ and C₂F₆.
• Works closely with OEM suppliers to determine the
  relationship of gas purity and process tool performance.