Air Products San Fu Gas Co. Ltd. - home
 
 
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Supplying electronic chemicals, equipment and on-site management for fabs.

  • CVD / deposition chemistries and delivery systems provided by Schumacher, a unit of Air Products.
  • Electronic process chemicals (through an alliance
    with Honeywell).
  • CMP slurries (through an alliance with DuPont).
  • Photoresist ancillaries/developer.
  • CHEMPURE™ GCG system for on-site generation
    of ultra-pure chemicals.
  • On-site operations experience through MEGASYS® Total Gas and Chemical Management System.
 
 
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