Ultra-High Purity Equipment

Delivering safe, reliable, cost-effective and high-quality performance at customers' sites around the world.

TRiMEGA

Surrounding the tool for the life of the fab.

GASGUARD® Gas Cabinets and Valve
Manifold Boxes have provided safe and
reliable gas storage and delivery for over
15 years.

Over 6,000 systems installed at customer
sites worldwide.

GASGUARD® Bulk Specialty Gas Systems
(BSGS) providing a safe, reliable supply of
specialty gas for large-volume customers.

QMAC® Analytical Systems provide state-of-
the-art analytical and monitoring capabilities
for gas distribution systems.

A 50/50 joint venture of Air Products and US
Filter/Kinetics Group.

Focused on providing the lowest cost of
ownership for a customer's gas, chemical and
water processed systems, including;
- waste water systems,
- ultrapure water,
- chemical & slurry delivery equipment,

Total solutions for new, start-up fabs and for
major expansions of existing facilities.